Calibration requirements for identifying and sizing wafer defects by scanner measurements
- Author(s):
- Publication title:
- Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4099
- Pub. Year:
- 2000
- Page(from):
- 42
- Page(to):
- 47
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437440 [0819437441]
- Language:
- English
- Call no.:
- P63600/4099
- Type:
- Conference Proceedings
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