"Projection lenses for high-resolution ablation with exclmer lasers: high-performance, widefield, and high-UV laser power"
- Author(s):
Schlichting,J. Winkler,K. Korner,L. Schletterer,T. Burghardt,B. Kahlert,H.-J. - Publication title:
- Current developments in lens design and optical systems engineering : 2-4 August 2000, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4093
- Pub. Year:
- 2000
- Page(from):
- 349
- Page(to):
- 359
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437389 [0819437387]
- Language:
- English
- Call no.:
- P63600/4093
- Type:
- Conference Proceedings
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