Evaluation of characteristics of VUV optical materials irradiated by F2 laser
- Author(s):
Itakura,Y. Yoshida,F. Kawasa,Y. Sumitani,A. Wakabayashi,O. Mizoguchi,H. - Publication title:
- First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4088
- Pub. Year:
- 2000
- Page(from):
- 205
- Page(to):
- 208
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437310 [081943731X]
- Language:
- English
- Call no.:
- P63600/4088
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Evaluation of characteristics of VUV optical materials irradiated by F2 laser
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Development and evaluation of an F2 laser for immersion interference lithography at 157 nm
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Highly durable low CoO mass production version of 2-kHz ArF excimer laser for DUV lithography
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
1-kHz 5-W ArF excimer laser for microlithography with highly narrow 0.7-pm bandwidth and issues on durability related to optical damage
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |