High-repetition-rate ArF excimer laser for microlithography | 東京工業大学附属図書館文献データベース

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High-repetition-rate ArF excimer laser for microlithography

Author(s):

Publication title:

First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4088

Pub. Year:

2000

Page(from):

191

Page(to):

194

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819437310 [081943731X]

Language:

English

Call no.:

P63600/4088

Type:

Conference Proceedings

Details

TDL ID:	ZA00011826
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Laser Precision Microfabrication
Conf. info. (Number):	2000 : 1st
Conf. info. (Venue):	Omiya, Saitama, Japan
Conf. info. (Date):	2000.06.14-2000.06.16

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