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High-resolution contact lithography by excimer lasers

Author(s):
Huang,H.
Lu,D.
Du,L.
Zhao,Y.
Yuan,C.
Jiang,B.
Wang,R.
2 more
Publication title:
First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4088
Pub. Year:
2000
Page(from):
168
Page(to):
170
Pages:
3
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437310 [081943731X]
Language:
English
Call no.:
P63600/4088
Type:
Conference Proceedings

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