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Electrostatically Actuated Silicon Micromachined Sensors for Scanning Force Microscopy

Author(s):
Publication title:
Forces in scanning probe methods
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
286
Pub. Year:
1995
Page(from):
79
Page(to):
84
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792334064 [079233406X]
Language:
English
Call no.:
N11482/286
Type:
Conference Proceedings

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