LOW-ENERGY ION/SURFACE INTERACTIONS DURING FILM GROWTH KINETICS, DEFECT STRUCTURE, AND ELEMENTAL INCORPORATION PROBABILITIES

LOW-ENERGY ION/SURFACE INTERACTIONS DURING FILM GROWTH KINETICS, DEFECT STRUCTURE, AND ELEMENTAL INCORPORATION PROBABILITIES

Author(s):

Publication title:

Plasma-surface interactions and processing of materials

Title of ser.:

NATO ASI series. Series E, Applied sciences

Ser. no.:

176

Pub. Year:

1990

Page(from):

281

Page(to):

311

Pages:

31

Pub. info.:

Dordrecht: Kluwer Academic Publishers

ISSN:

0168132X

ISBN:

9780792305842 [0792305841]

Language:

English

Call no.:

N11482/176

Type:

Conference Proceedings

Details

TDL ID:	ZA00021035
Series ID:	PA00000018
Conf. info. (Name):	NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials
Conf. info. (Number):	1988
Conf. info. (Venue):	Alicante, Spain
Conf. info. (Date):	1988.09.04-1988.09.16

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