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"Structure and properties of a-Si : H : F films obtained by R. F. glow-discharge in SiH4-F2 mixtures"

Author(s):
Publication title:
Glass-- current issues
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
92
Pub. Year:
1985
Page(from):
696
Page(to):
696
Pages:
1
Pub. info.:
Dordrecht: Martinus Nijhoff Publishers
ISSN:
0168132X
ISBN:
9789024731558 [9024731550]
Language:
English
Call no.:
N11482/92
Type:
Conference Proceedings

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