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Highly chemical reactive ion etching of gallium nitride

Author(s):
Karouta, F.
Jacobs, B.
Moerman, I.
Jacobs, K.
Weyher, J. L.
Porowski, S.
Crane, R.
Hageman, P. R.
3 more
Publication title:
GaN and related alloys - 1999 : symposium held November 28-December 3, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
595
Pub. Year:
2000
Page(from):
W11.76.1
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995031 [155899503X]
Language:
English
Call no.:
M23500/595
Type:
Conference Proceedings

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