Analysis of manufacturing-scale MEMS reliability testing
- Author(s):
- Delak,K.M. ( Analog Devices,Inc )
- Bova,P.
- Hartzell,A.L.
- Woodilla,D.J.
- Publication title:
- MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3880
- Pub. Year:
- 1999
- Page(from):
- 165
- Page(to):
- 174
- Pub. info.:
- Bellingham, Washington: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434777 [0819434779]
- Language:
- English
- Call no.:
- P63600/3880
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering, IMAPS |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Full-chip manufacturing reliability check implementation for 90-nm and 65-nm nodes using CPL and DDL
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
First reliability test of a surface-micromachined microengine using SHiMMeR
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device [6111-23]
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Experimental analysis of the benefits of shunted piezoceramics for damped and undamped structures
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
American Society of Mechanical Engineers |