Strength of polysilicon for MEMS devices

Strength of polysilicon for MEMS devices

Author(s):

LaVan,D.A. ( Sandia National Labs. )
Buchheit,T.E.

Publication title:

MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3880

Pub. Year:

1999

Page(from):

40

Page(to):

44

Pub. info.:

Bellingham, Washington: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434777 [0819434779]

Language:

English

Call no.:

P63600/3880

Type:

Conference Proceedings

Details

TDL ID:	ZA00020885
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : MEMS reliability for critical and space applications
Conf. info. (Number):	1999
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.09.21-1999.09.22

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