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New ion-assisted filtered cathodic arc deposition(IFCAD)technology for producing advanced thin films on temperature-sensitive substrates

Author(s):
Fulton,M.L. ( Ion Arc Corp. )  
Publication title:
Solar optical materials XVI : 22 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3789
Pub. Year:
1999
Page(from):
29
Page(to):
37
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432759 [081943275X]
Language:
English
Call no.:
P63600/3789
Type:
Conference Proceedings

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