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Straightness measurements using a reflection confocal optical system

Author(s):
Matsuda,K. ( Univ.of Sydney(Australia)and Japan Science and Technology Corp. )
Eiju,T.
Roy,M.
O'Byrne,J.W.
Fekete,P.W.
Sheppard,C.J.R.
1 more
Publication title:
18th Congress of the International Commission for Optics : Optics for the next millennium : 2-6 August, 1999, San Francisco, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3749
Pub. Year:
1999
Page(from):
589
Page(to):
590
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432346 [0819432342]
Language:
English
Call no.:
P63600/3749
Type:
Conference Proceedings

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