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Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS

Author(s):
Publication title:
18th Congress of the International Commission for Optics : Optics for the next millennium : 2-6 August, 1999, San Francisco, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3749
Pub. Year:
1999
Page(from):
468
Page(to):
469
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432346 [0819432342]
Language:
English
Call no.:
P63600/3749
Type:
Conference Proceedings

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