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Characterization of MEMS microgears rotating up to 360,000 rpm by stroboscopic optoelectronic laser interferometry microscope(SOELIM)methodology

Author(s):
Publication title:
Laser interferometry X : techniques and analysis : 31 July-1 August 2000, Sandiego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4101
Pub. Year:
2000
Vol.:
Part B
Page(from):
592
Page(to):
600
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437464 [0819437468]
Language:
English
Call no.:
P63600/4101
Type:
Conference Proceedings

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