Characterization of MEMS microgears rotating up to 360,000 rpm by stroboscopic optoelectronic laser interferometry microscope(SOELIM)methodology
- Author(s):
- Brown,G.C. ( Worcester Polytechnic Institute )
- Pryputniewicz,R.J.
- Boer,M.P.de
- Miller,S.L.
- Publication title:
- Laser interferometry X : techniques and analysis : 31 July-1 August 2000, Sandiego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4101
- Pub. Year:
- 2000
- Vol.:
- Part B
- Page(from):
- 592
- Page(to):
- 600
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437464 [0819437468]
- Language:
- English
- Call no.:
- P63600/4101
- Type:
- Conference Proceedings
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