Minimization of systematic errors in phase-shifting interferometry:evaluation of residuals

Minimization of systematic errors in phase-shifting interferometry:evaluation of residuals

Author(s):

Publication title:

Laser interferometry X : techniques and analysis : 31 July-1 August 2000, Sandiego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4101

Pub. Year:

2000

Vol.:

Part B

Page(from):

582

Page(to):

591

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819437464 [0819437468]

Language:

English

Call no.:

P63600/4101

Type:

Conference Proceedings

Details

TDL ID:	ZA00020380
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Laser interferometry
Conf. info. (Number):	2000 : 10th
Conf. info. (Venue):	San Diego, USA, USA
Conf. info. (Date):	2000.07.31-2000.08.01

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