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Structural, optical and electrical characteristics of silicon carbon nitride

Author(s):
Chen, L. C.
Wu, C. T.
Wen, C-Y.
Wu, J-J.
Liu, W. T.
Liu, C. W.
1 more
Publication title:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
592
Pub. Year:
2000
Page(from):
219
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995000 [1558995005]
Language:
English
Call no.:
M23500/592
Type:
Conference Proceedings

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