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An XPS study of silicon oxynitride rapid thermally grown in nitric oxide

Author(s):
Lai, W. H.
Li, M. F.
Pan, J. S.
Liu, R.
Chan, L.
Chua, T. C.
1 more
Publication title:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
592
Pub. Year:
2000
Page(from):
171
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995000 [1558995005]
Language:
English
Call no.:
M23500/592
Type:
Conference Proceedings

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