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Ultrathin NO/N2O oxynitride dielectric for advanced flash memory application: Single wafer and batch technology

Author(s):
Zonca, R.
Crivelli, B.
Polignano, M. L.
Cazzaniga, F.
Alessandri, M.
Caricato, A. P.
Bersani, M.
Sbetti, M.
Vanzetti, L.
Xing, G. C.
Miner, G. E.
Astici, N.
Kuppurao, S.
Lopes, D.
Nesso, S.
10 more
Publication title:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
592
Pub. Year:
2000
Page(from):
141
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995000 [1558995005]
Language:
English
Call no.:
M23500/592
Type:
Conference Proceedings

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