Excimer laser crystallization of amorphous silicon films for poly-Si TFT fabrication
- Author(s):
Tanabe, Hiroshi Sera, Kenji Nakamura, Ken-Ichi Hirata, Kazumi Yuda, Katsuhisa Okumura, Fujio - Publication title:
- Crystallization and related phenomena in amorphous materials : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 321
- Pub. Year:
- 1994
- Page(from):
- 677
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992207 [1558992200]
- Language:
- English
- Call no.:
- M23500/321
- Type:
- Conference Proceedings
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