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Lateral grain growth in the excimer laser crystallization of poly-Si

Author(s):
Kuriyama, H.
Sano, K.
Ishida, S.
Nohda, T.
Aya, Y.
Kuwahara, T.
Noguchi, S.
Kiyama, S.
Tsuda, S.
Nakano, S.
5 more
Publication title:
Crystallization and related phenomena in amorphous materials : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
321
Pub. Year:
1994
Page(from):
657
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992207 [1558992200]
Language:
English
Call no.:
M23500/321
Type:
Conference Proceedings

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