SPUTTER DEPOSITION AND THERMALLY INDUCED PHASE TRANSFORMATION OF NON-BCC CHROMIUM THIN FILMS
- Author(s):
- Publication title:
- Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 311
- Pub. Year:
- 1993
- Page(from):
- 361
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992078 [1558992073]
- Language:
- English
- Call no.:
- M23500/311
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Formation and Phase Transformation of rf Sputter Deposited Non-BCC ヲト-A15 Chromium Thin Films
MRS - Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
PLASMA POLYMERIZATION OF FLUOROCARBON THIN FILMS ON GLASS AND METAL SUBSTRATES
MRS - Materials Research Society |
8
Conference Proceedings
Stress, Microstructure And Temperature Stability Of Reactive Sputter Deposited WNx Thin Films
Materials Research Society |
3
Conference Proceedings
Stress and Stability of Sputter-Deposited A-15 and bcc Crystal Structure Tungsten Thin Films
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
Electrochemical Society |
5
Conference Proceedings
THE SCIENCE, TECHNOLOGY AND MATERIALS APPLICATIONS OF PHYSICAL VAPOR DEPOSITION PROCESSES
Kluwer Academic Publishers |
Materials Research Society |
6
Conference Proceedings
Stress, microstructure and temperature stability of reactive sputter deposited Ta(N) thin films
MRS-Materials Research Society |
Materials Research Society |