ION BOMBARDMENT EFFECTS ON THE GROWTH OF RUTILE PHASE OF REACTIVELY SPUTTERED TiO2 THIN FILMS

ION BOMBARDMENT EFFECTS ON THE GROWTH OF RUTILE PHASE OF REACTIVELY SPUTTERED TiO2 THIN FILMS

Author(s):

Publication title:

Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

311

Pub. Year:

1993

Page(from):

233

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992078 [1558992073]

Language:

English

Call no.:

M23500/311

Type:

Conference Proceedings

Details

TDL ID:	ZA00020791
Series ID:	PA00000011
Conf. info. (Name):	Symposium on phase transformations in thin films-thermodynamics and kinetics
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1993.04.13-1993.04.15

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