CoSi2 FORMATION ON STRAINED GexSi1-x LAYERS BY Co/GexSi1-x THERMAL REACTION

CoSi2 FORMATION ON STRAINED GexSi1-x LAYERS BY Co/GexSi1-x THERMAL REACTION

Author(s):

Publication title:

Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

311

Pub. Year:

1993

Page(from):

155

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992078 [1558992073]

Language:

English

Call no.:

M23500/311

Type:

Conference Proceedings

Details

TDL ID:	ZA00020791
Series ID:	PA00000011
Conf. info. (Name):	Symposium on phase transformations in thin films-thermodynamics and kinetics
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1993.04.13-1993.04.15

Similar Items:

1 Conference Proceedings ENHANCED RELAXATION OF STRAINED GexSi1-x LAYERS INDUCED BY Co/GexSi1-x THERMAL REACTION Ridgway, M. C., Rao, M. R., Baribeau, J.-M. MRS - Materials Research Society	7 Conference Proceedings EPITAXIAL CoSi2/POROUS-SI STRAINED LAYER STRUCTURES GROWN BY MBE Kao, Y. C., Jamieson, D., Bai, G.,, Nieh, C. W., Lin, T. L., Wu, B. J., Chen, H. Y., Wang, K. L. Materials Research Society
2 Conference Proceedings Co/SiXGe1-X ALLOY FORMATION ON STRAINED SiXGe1-X LAYERS Ridgway, M C., Elliman, R. G., Hauser, N., Baribeau, J.-M., Jackman, T. E. Materials Research Society	8 Conference Proceedings A surface micromachined amorphous GexSi1-xOy bolometer for thermal imaging applications Ahmed, A. H. Z., Tait, R. N., Oogarah, T. B., Liu, H. C., Denhoff, M. W., Sproule, G, l., Graham, M. J. SPIE - The International Society of Optical Engineering
3 Conference Proceedings ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF GeXSi1-X/Si HETEROSTRUCTURES Elliman, R.G., Ridgway, M.C., Williams, J.S. Materials Research Society	9 Conference Proceedings X-RAY STUDY OF INTERDIFFUSION AND STRAIN RELAXATION IN ANNEALED (SiMGeN)P ATOMIC LAYER SUPERLATTICES Baribeau, J.-M., Pascual, R., Saimoto, S. Materials Research Society
4 Conference Proceedings ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF NiSi2 AND CoSi2 Ridgway, M.C., Elliman, R.G., Williams, J.S. Materials Research Society	10 Conference Proceedings EFFECT OF AN INTERFACIAL Ti LAYER ON THE FORMATION OF CoSi2 ON Si Barmak, K., Clevenger, L. A., Agnello, P. D., Ganin, E., Copel, M., Dehaven, P., Falta, J., d'Heurle, F. M., Cabral Jr., … Materials Research Society
5 Conference Proceedings The Fabrication of High-Speed Electronic Devices by Ion-Beam Synthesis of GexSi1-x Strained Layers Elliman, R. G., Jiang, H., Wong, W. C., Kringhoj, P. MRS - Materials Research Society	11 Conference Proceedings VERY THICK COHERENTLY STRAINED GexSi1-x LAYERS GROWN IN A NARROW TEMPERATURE WINDOW Chern, C.H., Wang, K.L., Bai, G., Nicolet, M.-A. Materials Research Society
6 Conference Proceedings NUCLEAR REACTION ANALYSIS OF SHALLOW B AND BF2 IMPLANTS IN Si Ridgway, Mark C, Scanlon, P. J., Whitton,. J. L. Materials Research Society	12 Conference Proceedings Formation of Epitaxial CoSi2 Layers Grown from the Interaction of Co/Ti Bilayers with Si<100> Substrates Cardenes, J., Zhang, S-L., Svensson, B. G., Petersson, C. S. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12