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Electron cyclotron resonance CVD of silicon oxynitride for optoelectronic applications

Author(s):
Boudreau, M.
Boumerzoug, M.
Kruzelecky, R. V.
Mascher, P.
Jessop, P. E.
Thompson, D. A.
1 more
Publication title:
III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
300
Pub. Year:
1993
Page(from):
183
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558991965 [1558991964]
Language:
English
Call no.:
M23500/300
Type:
Conference Proceedings

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