Adhesion Promotion By Surface-Modification at the PMMA-Metal Interface For LIGA-Type Processing

Adhesion Promotion By Surface-Modification at the PMMA-Metal Interface For LIGA-Type Processing

Author(s):

Publication title:

Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

518

Pub. Year:

1998

Page(from):

149

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994249 [1558994246]

Language:

English

Call no.:

M23500/518

Type:

Conference Proceedings

Details

TDL ID:	ZA00020785
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microelectromechanical structures for materials research
Conf. info. (Number):	1998
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1998.04.15-1998.04.16

Similar Items:

1 Conference Proceedings LIGA-like process for high-aspect-ratio PZT microstructures Lee,G.S., Jin,Y.Y., Park,S.J., Ajmera,P.K., Malek,C.Khan, Wang,J.T., Tang,F. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Dimensional variation and roughness of LIGA-fabricated microstructures Egert,C.M., Wood,R., Malek,C.Khan SPIE-The International Society for Optical Engineering
2 Conference Proceedings Fabrication of high-aspect-ratio precision MEMS with LIGA using synchrotron radiation (Invited Paper) Khan Malek, C.G. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Planarization of metallic parts for single- and multilevel (S)LIGA Khan Malek,C., Wood,R.L., Genova,P. SPIE-The International Society for Optical Engineering
3 Conference Proceedings THE ROLE OF SURFACE MODIFICATION ON ADHESION AT THE METAL/POLYMER INTERFACE Berry, M. J., Turlik, I., Smith, P. L., Adema, G. M. Materials Research Society	9 Conference Proceedings Electroplating for LIGA Processing Bonivert, W.D., Hruby, J.M., Hachman, J.T., Kahn Malek, C., Jackson, K. H., Brennan, R.A., Hecht, M.H., Wiberg, D. Electrochemical Society
4 Conference Proceedings Cyanoactrylate bonding of thick resists for LIGA Rogers,J.G., Marques,C., Kelly,K.W., Sangishetty,V., Malek,C.Khan SPIE-The International Society for Optical Engineering	10 Conference Proceedings X-ray micromachining of high-aspect-ratio MEMS using SU8 ultrathick photoresist Malek,C.G.Khan SPIE-The International Society for Optical Engineering
5 Conference Proceedings High-aspect-ratio electroformed Ni-Co microstructures with improved mold adhesion using a LIGA-like process and a Novolak sublayer Malek,C.K., Thomas,L. SPIE - The International Society for Optical Engineering	11 Conference Proceedings X-ray exposures of electrodeposited photoresist for conformal lithography on corrugated surfaces Hartley,F.T., Khan Malek,C., Nguyen,S. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing Das,S.S., Manohara,H.M., Malek,C.K. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Microlens fabrication using glass transition temperature modification by the LIGA process Lee,S.-K., Lee,K.-C., Lee,S.S. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12