Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients

Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients

Author(s):

Publication title:

Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

518

Pub. Year:

1998

Page(from):

131

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994249 [1558994246]

Language:

English

Call no.:

M23500/518

Type:

Conference Proceedings

Details

TDL ID:	ZA00020785
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microelectromechanical structures for materials research
Conf. info. (Number):	1998
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1998.04.15-1998.04.16

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