A Bistable Membrane Approach to Micromachined Displays
- Author(s):
- Fleming, J. G.
- Publication title:
- Flat-panel display materials--1998 : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 508
- Pub. Year:
- 1998
- Page(from):
- 219
- Pub. info.:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994140 [1558994149]
- Language:
- English
- Call no.:
- M23500/508
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Combining the best of bulk and surface micromachining using Si {111} substrates
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Micromachined sensor and actuator research at the Microelectronics Development Laboratory
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
Novel silicon fabrication process for high-aspect-ratio micromachined parts
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Fabrication of large-area gratings with submicron pitch using mold micromachining
SPIE-The International Society for Optical Engineering |
MRS-Materials Research Society |
11
Conference Proceedings
Materials science approach to the fabrication of 3D silicon photonic lattices(Invited Paper)
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Bistable twisted nematic liquid crystal display based on a triode electrode structure
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Failure analysis of tungsten-coated polysilicon micromachined microengines
SPIE-The International Society for Optical Engineering |