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Low-Temperature Formation of SiNx Gate Insulator for Thin-Film Transistor Using CAT-CVD Method

Author(s):
Publication title:
Flat-panel display materials--1998 : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
508
Pub. Year:
1998
Page(from):
151
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994140 [1558994149]
Language:
English
Call no.:
M23500/508
Type:
Conference Proceedings

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