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LCVD of CNx Layers From NH3/CCl4 Mixture Using CuBr Vapor Laser

Author(s):
Ivanov, B.
Popov, C.
Dimitrov, D.
Shanov, V.
Zambov, L.
Georgiev, M.
Peev, G.
2 more
Publication title:
Covalently bonded disordered thin-film materials : symposium held December 2-4, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
498
Pub. Year:
1998
Page(from):
271
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994034 [1558994033]
Language:
English
Call no.:
M23500/498
Type:
Conference Proceedings

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