Blank Cover Image

Cathodic Arc Deposition of Tetrahedral Amorphous Carbon: Influence of Process Parameters on Microstructure and Hardness

Author(s):
Publication title:
Covalently bonded disordered thin-film materials : symposium held December 2-4, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
498
Pub. Year:
1998
Page(from):
135
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994034 [1558994033]
Language:
English
Call no.:
M23500/498
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Deposition and Characterization of Silicon and Carbon Nitride

Myers, A. F., Tucker, D. A., Bozeman, S. P., Camphausen, S. M., Powers, M. J., Bruley, J., Hren, J. J., Cuomo, J. J.

MRS - Materials Research Society
7 Conference Proceedings ION-ASSISTED PULSED LASER DEPOSITION OF AMORPHOUS TETRAHEDRAL-COORDINATED CARBON FILMS

Friedman, T. A., Tallant, D. R., Sullivan, J. P., Siegal, M. P., Simpson, R. L.

MRS - Materials Research Society
2 Conference Proceedings Structural and Electrical Properties of Phosphorous-Doped Amorphous Diamond

Camphausen, S. M., Myers, A. F., Bozeman, S. P., Cuomo, J. J.

MRS - Materials Research Society
8 Conference Proceedings Effect of Metal Back Contacts on Tetrahedral Amorphous Carbon Films Grown Using the Cathodic Arc Process

Satyanarayana, B.S., Takahashi, H., Narusawa, T., Hiraki, A.

Materials Research Society
3 Conference Proceedings Carbon Nitride Films Using a Filtered Cathodic Arc

Camphausen, Scott M., Tucker, D. A., Bruley, J., Cuomo, J. J.

MRS - Materials Research Society
9 Conference Proceedings SURFACE STRUCTURE OF TETRAHEDRAL-COORDINATED AMORPHOUS DIAMOND-LIKE CARBON FILMS GROWN BY PULSED LASER DEPOSITION

Mercer, T. W., DiNardo, N. J., Martinez-Miranda, L. J., Fang, F., Friedmann, T. A., Sullivan, J. P., Siegal, M. P.

MRS - Materials Research Society
4 Conference Proceedings Electron Emission Through Tetrahedral Amorphous Carbon Coatings on Mo and Si Emitters

Choi, W. B., Myers, A. F., Ding, M. Q., Sharma, A. K., Narayan, J., Hren, J. J., Cuomo, J. J.

MRS - Materials Research Society
10 Conference Proceedings PROPERTIES OF HYDROGENATED TETRAHEDRAL AMORPHOUS CARBON

Weiler, M., Sattel, S., Robertson, J., Jung, K., Ehrhardt, H.

Electrochemical Society
5 Conference Proceedings Properties of Tetrahedral Amorphous Carbon Deposited by a Filtered Cathodic Vacuum Arc

Chhowalla, M., Chen, C. W., Kleinsorge, B., Robertson, J., Amaratunga, G. A. J., Milne, W. I.

MRS - Materials Research Society
11 Conference Proceedings Properties of Tetrahedral Amorphous Carbon Films Deposited by the Filtered Cathodic Arc Method

Nagata, Naruhisa, Kusakawa, Kazuhiro, Kumagai, Akiyasu, Matsuyama, Hideaki

Materials Research Society
6 Conference Proceedings TEM and EELS Investigations of a-C and ta-C Coated Field Emitters

Myers, A. F., Steel, E. B., Ding, M. Q., Camphausen, S. M., Choi, W. B., Cuomo, J. J., Hren, J. J.

MRS - Materials Research Society
12 Conference Proceedings Analytical Characterization of Process Parameter Influence on the Initial Growth and Crystallinity of Atomic Layer Deposition HfO2 Thin Films

Blin, D., Rochat, N., Rolland, G., Holliger, P., Martin, F., Damlencourt, J.-F., Lardin, T., Besson, P., Haukka, S., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12