Patterning of GaN in High-Density Cl2- and BCl3-Based Plasmas
- Author(s):
Shul, R. J. Briggs, R. D. Han, J. Pearton, S. J. Lee, J. W. Vartuli, C. B. Killeen, K. P. Ludowise, M. J. - Publication title:
- Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 468
- Pub. Year:
- 1997
- Page(from):
- 355
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993723 [155899372X]
- Language:
- English
- Call no.:
- M23500/468
- Type:
- Conference Proceedings
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