ION BEAM SPUTTER DEPOSITION OF REFRACTORY METAL OXIDES
- Author(s):
- Publication title:
- Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 354
- Pub. Year:
- 1995
- Page(from):
- 529
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992559 [1558992553]
- Language:
- English
- Call no.:
- M23500/354
- Type:
- Conference Proceedings
Similar Items:
MRS - Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
9
Conference Proceedings
MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING FOR METAL OXIDE THIN FILMS
MRS - Materials Research Society |
4
Conference Proceedings
Damage in Refractory Oxides and Ion Beam Mixing at Metal-Oxide Interfaces Induced by GeV and 20 MeV Cluster Beam
MRS - Materials Research Society |
10
Conference Proceedings
Ion beam sputter deposition of low-defect EUV mask blanks on 6-in. LTEM substrates in a real production environment
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
DEPOSITION OF CONDUCTIVE TITANIUM SUB-OXIDE FILMS BY REACTIVE ION-BEAM SPUTTERING
MRS - Materials Research Society |
11
Conference Proceedings
METAL VAPOUR VACUUM ARC ION SOURCE TO SYNTHESIZE REFRACTORY METAL SILICIDES
MRS - Materials Research Society |
Materials Research Society |
12
Conference Proceedings
METAL VAPOUR VACUUM ARC ION SOURCE TO SYNTHESIZE REFRACTORY METAL SILICIDES
MRS - Materials Research Society |