SPUTTERING INDUCED CHANGES IN DEFECT MORPHOLOGY AND DOPANT DIFFUSION FOR Si IMPLANTED GaAs: INFLUENCE OF ION ENERGY AND IMPLANT TEMPERATURE
- Author(s):
Robinson, H. G. Lee, C. C. Haynes, T. E. Allen, E. L. Deal, M. D. Jones, K. S. - Publication title:
- Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 354
- Pub. Year:
- 1995
- Page(from):
- 337
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992559 [1558992553]
- Language:
- English
- Call no.:
- M23500/354
- Type:
- Conference Proceedings
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