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ETCHING AND CHARGING EFFECTS ON DOSE IN PLASMA IMMERSION ION IMPLANTATION

Author(s):
Publication title:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
354
Pub. Year:
1995
Page(from):
111
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992559 [1558992553]
Language:
English
Call no.:
M23500/354
Type:
Conference Proceedings

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