EQUAL THICKNESS CONTOURS OF FILMS DEPOSITED ON INCLINED SUBSTRATES BY EVAPORATION AND ION BEAM ASSISTED DEPOSITION

EQUAL THICKNESS CONTOURS OF FILMS DEPOSITED ON INCLINED SUBSTRATES BY EVAPORATION AND ION BEAM ASSISTED DEPOSITION

Author(s):

Publication title:

Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

354

Pub. Year:

1995

Page(from):

57

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992559 [1558992553]

Language:

English

Call no.:

M23500/354

Type:

Conference Proceedings

Details

TDL ID:	ZA00020770
Series ID:	PA00000011
Conf. info. (Name):	Symposium on beam-solid interactions for materials synthesis and characterization
Conf. info. (Number):	1994
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1994.11.28-1994.12.02

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