Blank Cover Image

INTERNAL STRESS CHANGE OF PHOSPHORUS-DOPED AMORPHOUS SILICON THIN FILMS DURING CRYSTALLIZATION

Author(s):
Publication title:
Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
343
Pub. Year:
1994
Page(from):
573
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992436 [155899243X]
Language:
English
Call no.:
M23500/343
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings INITIAL EVOLUTION OF COBALT SILICIDES IN THE COBALT/AMORPHOUS-SILICON THIN FILM SYSTEM

Miura, Hideo, Ma, En, Thompson, Carl V.

Materials Research Society
7 Conference Proceedings Hydrogen Diffusion in Boron-Doped Hydrogenated Amorphous Silicon Films: Crystallization and Induced Structural Changes

Kail, F., Hadjadj, A., Cabarrocas, P. Roca i

Materials Research Society
2 Conference Proceedings LASER DOPING AND CRYSTALLIZATION OF AMORPHOUS SILICON THIN FILMS

Boyce, J. B., Anderson, G. B., Carey, P. G., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E., Smith, P. M.

MRS - Materials Research Society
8 Conference Proceedings Texture Evolution During Crystallization of Thin Amorphous Films

Liu, Q.K.K., Schumacher, G.

Materials Research Society
3 Conference Proceedings Resistivity Reduction of Thin Polycrystalline Silicon Films Crystallized from In Situ Phosphorus-Doped Amorphous Silicon Deposited Using Silane or Disilane

Oguro, S., Shishiguchi, S., Arai, K.

Electrochemical Society
9 Conference Proceedings CRYSTALLIZATION OF TIN-IMPLANTED AMORPHOUS SILICON THIN FILMS

Lin, Fuyu, Hatalis, Miltiadis K.

Materials Research Society
4 Conference Proceedings CRYSTALLIZATION OF AMORPHOUS SILICON DURING THIN FILM GOLD REACTION

Hultman, Lars G., Psaras, P.A., Hentzell, H.T.G.

Materials Research Society
10 Conference Proceedings METAL INDUCED CRYSTALLIZATION OF AMORPHOUS SILICON THIN FILMS

Hempel, T., Schoenfeld, O., Veit, P.

Materials Research Society
5 Conference Proceedings Phosphorus and Boron Doping Effect on Nanocrystalline Formation in Hydrogenated Amorphous and Nanocrystalline Mixed-phase Silicon Thin Films

Chunsheng Jiang, Yanfa Yan, Helio Moutinho, Mowafak Al-Jassim, Baojie Yan, Laura Sivec, Jeff Yang, Subhendu Guha

Materials Research Society
11 Conference Proceedings NUCLEATION AND CRYSTALLIZATION OF AMORPHOUS SILICON-ALUMINUM THIN FILMS

Lin, F., Hatalis, M. K., Girginoudi, S., Girginoudi, D., Georgoulas, N., Thanailakis, A.

Materials Research Society
6 Conference Proceedings Influence of AC-Voltage on the Crystallization of Amorphous Silicon Thin Film during Field Aided Lateral Crystallization Process

Choi, S. H., Kim, Y. B., Wang, Y. H., Choi, D. K.

Trans Tech Publications
12 Conference Proceedings EFFECT OF RESIDUAL PHOSPHORUS ON AMORPHOUS SILICON THIN FILM TRANSISTORS

Tsutsu, H., Kawamura, T., Miyata, Y.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12