LOW DIELECTRIC CONSTANT, HIGH TEMPERATURE STABLE COPOLYMER THIN FILMS BY ROOM TEMPERATURE CHEMICAL VAPOR DEPOSITION

LOW DIELECTRIC CONSTANT, HIGH TEMPERATURE STABLE COPOLYMER THIN FILMS BY ROOM TEMPERATURE CHEMICAL VAPOR DEPOSITION

Author(s):

Publication title:

Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

343

Pub. Year:

1994

Page(from):

541

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992436 [155899243X]

Language:

English

Call no.:

M23500/343

Type:

Conference Proceedings

Details

TDL ID:	ZA00020769
Series ID:	PA00000011
Conf. info. (Name):	Symposium on polycrystalline thin films
Conf. info. (Number):	1994
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1994.04.04-1994.04.08

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