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Stability of glass probe tips for critical dimension measurement

Author(s):
Griffith,J.E. ( Lucent Technologies Bell Labs. )
Miller,G.L.
Hopkins,L.C.
Bryson,C.E.
Snyder,E.J.
Plombon,J.J.
Vasilyev,L.A.
Bindell,J.B.
3 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3050
Pub. Year:
1997
Page(from):
350
Page(to):
360
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424648 [0819424641]
Language:
English
Call no.:
P63600/3050
Type:
Conference Proceedings

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