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Studies on system and measuring method of far-field beam divergency in near field by Ronchi ruling

Author(s):
Zhou,C. ( Institute of Optics and Electronics )
Yang,L.
Ma,W.
Yan,P.
Fan,T.
He,S.
1 more
Publication title:
Automated optical inspection for industry : 6-7 November 1996, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2899
Pub. Year:
1996
Page(from):
539
Page(to):
544
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819423009 [0819423009]
Language:
English
Call no.:
P63600/2899
Type:
Conference Proceedings

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