Heterodyne interferometry with surface selectivity and fast response
- Author(s):
- Zhang,J. ( Leotec Corp. )
- Publication title:
- Automated optical inspection for industry : 6-7 November 1996, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2899
- Pub. Year:
- 1996
- Page(from):
- 240
- Page(to):
- 250
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819423009 [0819423009]
- Language:
- English
- Call no.:
- P63600/2899
- Type:
- Conference Proceedings
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