Chemical-mechanical polishing:enhancing the manufacturability of MEMS
- Author(s):
- Sniegowski,J.J. ( Sandia National Labs. )
- Publication title:
- Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2879
- Pub. Year:
- 1996
- Page(from):
- 104
- Page(to):
- 115
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422774 [0819422770]
- Language:
- English
- Call no.:
- P63600/2879
- Type:
- Conference Proceedings
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