Laser reactive ablation deposition of carbon nitride thin films

Laser reactive ablation deposition of carbon nitride thin films

Author(s):

Luches,A. ( Univ.degli Studi di Lecce )

Publication title:

High-Power Lasers: Applications and Emerging Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2789

Pub. Year:

1996

Page(from):

293

Page(to):

304

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421753 [0819421758]

Language:

English

Call no.:

P63600/2789

Type:

Conference Proceedings

Details

TDL ID:	ZA00020740
Series ID:	PA00000029
Conf. info. (Name):	Lasers, Optics, and Vision for Productivity in Manufacturing : High-Power Lasers:Applications and Emerging Applications
Conf. info. (Number):	1996
Conf. info. (Venue):	Besancon, France
Conf. info. (Date):	1996.06.12-1996.06.14

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