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Investigations of porous silicon layers with regard to chemical microsensor applications

Author(s):
Schoning,M.J. ( Forschungszentrum Julich GmbH )
Crott,M.
Ronkel,F.
Thust,M.
Schultze,J.W.
Kordos,P.
Luth,H.
2 more
Publication title:
Third international conference on intelligent materials : third European conference on smart structures and materials, Lyon/3-4-5 June 1996, center of congress "L'Espace tete d'or"
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2779
Pub. Year:
1996
Page(from):
275
Page(to):
280
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421654 [0819421650]
Language:
English
Call no.:
P63600/2779
Type:
Conference Proceedings

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