Investigations of porous silicon layers with regard to chemical microsensor applications
- Author(s):
Schoning,M.J. ( Forschungszentrum Julich GmbH ) Crott,M. Ronkel,F. Thust,M. Schultze,J.W. Kordos,P. Luth,H. - Publication title:
- Third international conference on intelligent materials : third European conference on smart structures and materials, Lyon/3-4-5 June 1996, center of congress "L'Espace tete d'or"
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2779
- Pub. Year:
- 1996
- Page(from):
- 275
- Page(to):
- 280
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421654 [0819421650]
- Language:
- English
- Call no.:
- P63600/2779
- Type:
- Conference Proceedings
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