Diffraction optical elements with deep phase profile obtained with the use of x-ray parallel intensive beam
- Author(s):
Koronkevich,V.P. ( Institute of Automation and Electrometry ) Kulipanov,G.N. Makarov,O.A. Nazmov,V.P. Pindyurin,V.F. Sinyukov,M.P. - Publication title:
- International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2648
- Pub. Year:
- 1995
- Page(from):
- 572
- Page(to):
- 577
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420213 [0819420212]
- Language:
- English
- Call no.:
- P63600/2648
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Application of deep x-ray lithography for fabrication of polymer regular membranes with submicrometer pores
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
New application for x-ray lithography:fabrication of blazed diffractive optical elements with a deep-phase profile
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Fabrication of diffractive optical elements by direct laser writing with circular scanning
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
Society of Manufacturing Engineers |
4
Conference Proceedings
New fabrication method for diffractive optical elements with deep phase relief
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Self-supporting tantalum masks for deep x-ray lithography with synchrotron radiation
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |