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Laser microscopy of electronic devices

Author(s):
Sheppard,C.J.R. ( Univ.of Sydney )  
Publication title:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2648
Pub. Year:
1995
Page(from):
545
Page(to):
547
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420213 [0819420212]
Language:
English
Call no.:
P63600/2648
Type:
Conference Proceedings

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