Diagnostics of Si-Ge alloys by spectroellipsometry

Diagnostics of Si-Ge alloys by spectroellipsometry

Author(s):

Litovchenko,V.G. ( Institute of Semiconductor Physics )

Publication title:

International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2648

Pub. Year:

1995

Page(from):

433

Page(to):

438

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420213 [0819420212]

Language:

English

Call no.:

P63600/2648

Type:

Conference Proceedings

Details

TDL ID:	ZA00020726
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Optical Diagnostics of Materials and Devices for Opto -, Micro-, and Quantum Electronics
Conf. info. (Number):	1995
Conf. info. (Venue):	Kiev, Ukraine
Conf. info. (Date):	1995.05.11-1995.05.13

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