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Study of Thermal Annealing of Vacancies in Ion Implanted 3C-SiC by Positron Annihilation

Author(s):
Ohshima,T.
Uedono,A.
Itoh,H.
Abe,K.
Suzuki,R.
Ohdaira,T.
Aoki,Y.
Yoshikawa,M.
Mikado,T.
Okumura,H.
Yoshida,S.
Tanigawa,S.
Nashiyama,I.
8 more
Publication title:
Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997
Title of ser.:
Materials science forum
Ser. no.:
264-268
Pub. Year:
1998
Vol.:
Part2
Page(from):
745
Page(to):
748
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497928 [0878497927]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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