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Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing

Author(s):
Publication title:
Hydrogen in compound semiconductors
Title of ser.:
Materials science forum
Ser. no.:
148-149
Pub. Year:
1994
Page(from):
189
Page(to):
218
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496723 [0878496726]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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