Role of Hydrogen in Semiconductor,Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition

Role of Hydrogen in Semiconductor,Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition

Author(s):

Publication title:

Hydrogen in compound semiconductors

Title of ser.:

Materials science forum

Ser. no.:

148-149

Pub. Year:

1994

Page(from):

61

Page(to):

112

Pub. info.:

Zurich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496723 [0878496726]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00020688
Series ID:	PA00000012

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